Cassard, J.
and Vernier, P.
(2007),
Electro-physical Technique for Post-fabrication Measurements of CMOS Process Layer Thicknesses, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32592
(Accessed December 9, 2024)
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Electro-physical Technique for Post-fabrication Measurements of CMOS Process Layer Thicknesses
Published
Author(s)
, Paul T. Vernier
Abstract
This paper presents a combined physical and electrical post-fabrication method for determining the thicknesses of the various layers in a commercial 1.5-um complementary-metal-oxide-semiconductor (CMOS) foundry process available through MOSIS. Forty-two thickness values are obtained from physical step height measurements performed on thickness test structures and from electrical measurements of capacitances, sheet resistances, and resistivities. Appropriate expressions, numeric values, and uncertainties for each layer thickness are presented, along with a systematic nomenclature for interconnect and dielectric thicknesses.Citation
Journal of Research (NIST JRES) -
Volume
112
Issue
5
NIST Pub Series
Pub Type
NIST Pubs
Download Paper
Keywords
CMOS, MEMS, nomenclature, platform height, step height, test structures, thickness, Young''''s modulus
Citation
Issues
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Created September 30, 2007, Updated October 12, 2021