@misc{774201,
  author = {Janet Cassard and Paul Vernier},
  title = {Electro-physical Technique for Post-fabrication Measurements of CMOS Process Layer Thicknesses},
  year = {2007},
  number = {112},
  month = {2007-10-01 00:10:00},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32592},
  language = {en},
}