TY  - GEN
AU  - Janet Cassard
AU  - Paul Vernier
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2007-10-01 00:10:00
LA  - en
M1  - 112
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2007
TI  - Electro-physical Technique for Post-fabrication Measurements of CMOS Process Layer Thicknesses
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32592
ER  -