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The Effects of Thin Films on Interferometric Step Height Measurements

Published

Author(s)

T. McWaid, Theodore V. Vorburger, J. F. Song, Deane Chandler-Horowitz
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)), Optical Applied Science and Engineering Symposium
Volume
1776
Conference Location
San Diego, CA, USA

Citation

McWaid, T. , Vorburger, T. , Song, J. and Chandler-Horowitz, D. (1992), The Effects of Thin Films on Interferometric Step Height Measurements, Proc. Intl. Soc. for Optical Engineering (SPIE)), Optical Applied Science and Engineering Symposium, San Diego, CA, USA (Accessed April 14, 2024)
Created December 30, 1992, Updated October 12, 2021