McWaid, T.
, Vorburger, T.
, Song, J.
and Chandler-Horowitz, D.
(1992),
The Effects of Thin Films on Interferometric Step Height Measurements, Proc. Intl. Soc. for Optical Engineering (SPIE)), Optical Applied Science and Engineering Symposium, San Diego, CA, USA
(Accessed April 28, 2024)
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The Effects of Thin Films on Interferometric Step Height Measurements
Published
Author(s)
T. McWaid, , J. F. Song,
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE)), Optical Applied Science and Engineering Symposium
Volume
1776
Conference Location
San Diego, CA, USA
Pub Type
Conferences
Citation
Created December 30, 1992, Updated October 12, 2021