TY  - CONF
AU  - McWaid, T.
AU  - Vorburger, Theodore
AU  - Song, J.
AU  - Chandler-Horowitz, Deane
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE)), Optical Applied Science and Engineering Symposium, San Diego, CA, USA
DA  - 1992-12-31 00:12:00
LA  - en
M1  - 1776
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE)), Optical Applied Science and Engineering Symposium, San Diego, CA, USA
PY  - 1992
TI  - The Effects of Thin Films on Interferometric Step Height Measurements
ER  -