@conference{776481,
  author = {T. McWaid and Theodore Vorburger and J. Song and Deane Chandler-Horowitz},
  title = {The Effects of Thin Films on Interferometric Step Height Measurements},
  year = {1992},
  number = {1776},
  month = {1992-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE)), Optical Applied Science and Engineering Symposium, San Diego, CA, USA},
  language = {en},
}