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Effect of topography and multi-asperity contacts on nano-scale elastic property measurements by atomic force acoustic microscopy,

Published

Author(s)

Gheorghe Stan, Robert F. Cook
Proceedings Title
Frontiers of Characterization and Metrology for Nanoelectronics
Conference Title
AIP CP931, pages 540-544

Citation

Stan, G. and Cook, R. (2007), Effect of topography and multi-asperity contacts on nano-scale elastic property measurements by atomic force acoustic microscopy,, Frontiers of Characterization and Metrology for Nanoelectronics , [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854372 (Accessed April 25, 2024)
Created September 1, 2007, Updated February 19, 2017