@conference{170671, author = {Gheorghe Stan and Robert Cook}, title = {Effect of topography and multi-asperity contacts on nano-scale elastic property measurements by atomic force acoustic microscopy,}, year = {2007}, month = {2007-09-01}, publisher = {Frontiers of Characterization and Metrology for Nanoelectronics }, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854372}, language = {en}, }