TY - CONF AU - Gheorghe Stan AU - Robert Cook C2 - Frontiers of Characterization and Metrology for Nanoelectronics DA - 2007-09-01 LA - en PB - Frontiers of Characterization and Metrology for Nanoelectronics PY - 2007 TI - Effect of topography and multi-asperity contacts on nano-scale elastic property measurements by atomic force acoustic microscopy, UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=854372 ER -