Documentation for Reference Material (RM) 8820: A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy

Published

February 3, 2014

Author(s)

Michael T. Postek, Andras Vladar, Bin Ming, Bunday Benjamin

Abstract

Reference Material (RM) 8820 is a multipurpose instrument calibration standard available from NIST. This is a dimensional standard initially developed to replace the out of stock RM 8090 used for X and Y scale calibrations of scanned particle beam microscopes. RM 8820 is a single, diced 20 mm x 20 mm chip from a 200 mm silicon wafer. There are four NIST RM 8820 patterns on the chip. Surrounding the RM 8820 patterns are many additional test patterns and test structures. These test structures were designed through the NIST collaboration with the SEMATECH Advanced Metrology (AMAG) and Overlay Metrology (OMAG) Advisory Groups. The test structures of RM 8820 were lithographically patterned on a silicon chip. These patterns can also be used for calibration and testing of instruments, other than a scanned particle beam microscopes, such as optical and scanned probe microscopes. In addition to scale calibration, RM 8820 can be used for many other purposes such as stage and scan linearity checking, and instrument contamination testing. This document describes the 8820 Reference Material, many of the additional test patterns and structures, as well as, some of the additional applications for which this standard can be employed.

Citation

Special Publication (NIST SP) - 1170

Report Number

1170

NIST Pub Series

Special Publication (NIST SP)

Pub Type

NIST Pubs

Download Paper

https://doi.org/10.6028/NIST.sp.1170

Keywords

standards, scanning electron microscope, traceability, magnifi cation, fi eld of view, scale, calibration, scatterometry, overlay, linearity

Citation

Postek, M. , Vladar, A. , Ming, B. and Benjamin, B. (2014), Documentation for Reference Material (RM) 8820: A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.sp.1170 (Accessed October 9, 2024)