@misc{20076,
  author = {Michael Postek and Andras Vladar and Bin Ming and Bunday Benjamin},
  title = {Documentation for Reference Material (RM) 8820: A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy},
  year = {2014},
  month = {2014-02-03},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.sp.1170},
  language = {en},
}