TY  - GEN
AU  - Michael Postek
AU  - Andras Vladar
AU  - Bin Ming
AU  - Bunday Benjamin
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2014-02-03
DO  - https://doi.org/10.6028/NIST.sp.1170
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2014
TI  - Documentation for Reference Material (RM) 8820: A Versatile, Multipurpose Dimensional Metrology Calibration Standard for Scanned Particle Beam, Scanned Probe and Optical Microscopy
ER  -