Bertness, K.
(2017),
Dimensional Measurement of Nanostructures with Scanning Electron Microscopy, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.250-96
(Accessed July 30, 2025)
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Dimensional Measurement of Nanostructures with Scanning Electron Microscopy
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Abstract
Scanning electron microscopy (SEM) is widely used for the measurement of dimensions of nanostructures. This document describes the calibration of SEM magnification using the ASTM E766-14 practice with NIST Reference Material (RM) 8820 and the calculation of dimensional uncertainty in the use of the calibrated SEM to measure dimensions of a fabricated nanostructure. The dimensional measurements are part of NIST Special Test 15510S.Citation
Special Publication (NIST SP) - 250-96
Report Number
250-96
NIST Pub Series
Pub Type
NIST Pubs
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Keywords
nanostructures, scanning electron microscopy
Citation
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Created September 20, 2017, Updated November 10, 2018