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Dimensional Measurement of Nanostructures with Scanning Electron Microscopy



Kristine A. Bertness


Scanning electron microscopy (SEM) is widely used for the measurement of dimensions of nanostructures. This document describes the calibration of SEM magnification using the ASTM E766-14 practice with NIST Reference Material (RM) 8820 and the calculation of dimensional uncertainty in the use of the calibrated SEM to measure dimensions of a fabricated nanostructure. The dimensional measurements are part of NIST Special Test 15510S.
Special Publication (NIST SP) - 250-96
Report Number


nanostructures, scanning electron microscopy


Bertness, K. (2017), Dimensional Measurement of Nanostructures with Scanning Electron Microscopy, Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD, [online], (Accessed June 20, 2024)


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Created September 20, 2017, Updated November 10, 2018