Dimensional Measurement of Nanostructures with Scanning Electron Microscopy
Kristine A. Bertness
Scanning electron microscopy (SEM) is widely used for the measurement of dimensions of nanostructures. This document describes the calibration of SEM magnification using the ASTM E766-14 practice with NIST Reference Material (RM) 8820 and the calculation of dimensional uncertainty in the use of the calibrated SEM to measure dimensions of a fabricated nanostructure. The dimensional measurements are part of NIST Special Test 15510S.