@misc{231081,
  author = {Kristine Bertness},
  title = {Dimensional Measurement of Nanostructures with Scanning Electron Microscopy},
  year = {2017},
  month = {2017-09-20},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.250-96},
  language = {en},
}