TY  - GEN
AU  - Kristine Bertness
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2017-09-20
DO  - https://doi.org/10.6028/NIST.SP.250-96
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2017
TI  - Dimensional Measurement of Nanostructures with Scanning Electron Microscopy
ER  -