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Diagnostic Measurements in RF Plasmas for Materials Processing

Published

Author(s)

J R. Roberts, James K. Olthoff, Mark A. Sobolewski, Richard J. Van Brunt, James Whetstone, S. Djurovic
Proceedings Title
Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas
Conference Dates
August 25-29, 1991
Conference Location
Portland, ME, US

Citation

Roberts, J. , Olthoff, J. , Sobolewski, M. , Van Brunt, R. , Whetstone, J. and Djurovic, S. (1992), Diagnostic Measurements in RF Plasmas for Materials Processing, Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas, Portland, ME, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28964 (Accessed March 28, 2024)
Created June 30, 1992, Updated October 12, 2021