Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition
William A. Kimes, Brent A. Sperling, James E. Maslar
The design and operation of a simple, optically-accessible modular reactor design for probing thermal atomic layer deposition processes is described. This reactor has a nominal footprint of 225 cm2 and a mass of approximately 6.6 kg, making it small enough to conveniently function as a modular component of an optical train. The design is simple, making fabrication straightforward and relatively inexpensive.
, Sperling, B.
and Maslar, J.
Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/jres.120.005
(Accessed December 11, 2023)