Kimes, W.
, Sperling, B.
and Maslar, J.
(2015),
Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/jres.120.005
(Accessed October 8, 2025)
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Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition
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Author(s)
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Abstract
The design and operation of a simple, optically-accessible modular reactor design for probing thermal atomic layer deposition processes is described. This reactor has a nominal footprint of 225 cm2 and a mass of approximately 6.6 kg, making it small enough to conveniently function as a modular component of an optical train. The design is simple, making fabrication straightforward and relatively inexpensive.Citation
Journal of Research (NIST JRES) -
Volume
120
NIST Pub Series
Pub Type
NIST Pubs
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Keywords
atomic layer deposition, ALD, diagnostics, absorption, infrared, IR, Reactor
Citation
Issues
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Created April 7, 2015, Updated November 14, 2018