Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition

Published

Author(s)

William A. Kimes, Brent A. Sperling, James E. Maslar

Abstract

The design and operation of a simple, optically-accessible modular reactor design for probing thermal atomic layer deposition processes is described. This reactor has a nominal footprint of 225 cm2 and a mass of approximately 6.6 kg, making it small enough to conveniently function as a modular component of an optical train. The design is simple, making fabrication straightforward and relatively inexpensive.
Citation
Journal of Research (NIST JRES) -
Volume
120

Keywords

atomic layer deposition, ALD, diagnostics, absorption, infrared, IR, Reactor

Citation

Kimes, W. , Sperling, B. and Maslar, J. (2015), Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition, Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/jres.120.005 (Accessed June 12, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created April 7, 2015, Updated November 14, 2018