TY  - GEN
AU  - William Kimes
AU  - Brent Sperling
AU  - James Maslar
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2015-04-07
DO  - https://doi.org/10.6028/jres.120.005
LA  - en
M1  - 120
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2015
TI  - Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition
ER  -