@misc{227316,
  author = {William Kimes and Brent Sperling and James Maslar},
  title = {Design and Operation of an Optically-Accessible Modular Reactor for Diagnostics of Thermal Atomic Layer Deposition},
  year = {2015},
  number = {120},
  month = {2015-04-07},
  publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/jres.120.005},
  language = {en},
}