This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples.
Proceedings Title: Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767
Conference Dates: August 1-6, 2010
Conference Location: San Diego, CA
Conference Title: SPIE NanoScience + Engineering
Pub Type: Conferences
Carbon Nanotube, Dopant profiling, Scanning Capacitance Microscope