@conference{42571,
  author = {Joseph Kopanski and Victor Vartanian and Vladimir Mancevski and Phillip Rack and Ilona and Matthew Bresin},
  title = {Conductive Carbon Nanotubes for Semiconductor Metrology},
  year = {2010},
  number = {7767},
  month = {2010-08-10},
  publisher = {Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906923},
  language = {en},
}