Kopanski, J.
, Vartanian, V.
, Mancevski, V.
, Rack, P.
, , I.
and Bresin, M.
(2010),
Conductive Carbon Nanotubes for Semiconductor Metrology, Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906923
(Accessed September 19, 2024)
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Conductive Carbon Nanotubes for Semiconductor Metrology
Published
Author(s)
, Victor H. Vartanian, Vladimir Mancevski, Phillip D. Rack, Ilona Sitnitsky, Matthew D. Bresin
Abstract
This paper presents an evaluation of e-beam assisted deposition and welding of conductive carbon nanotube (c-CNT) tips for electrical scanning probe microscope measurements. Variations in CNT tip conductivity and contact resistance during fabrication were determined as a function of tip geometry using tunneling AFM (TUNA). Conductive CNT tips were used to measure 2D dopant concentration as a function of annealing conditions in BF2-implanted samples.Proceedings Title
Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767
Volume
7767
Conference Dates
August 1-6, 2010
Conference Location
San Diego, CA
Conference Title
SPIE NanoScience + Engineering
Pub Type
Conferences
Download Paper
Keywords
Carbon Nanotube, Dopant profiling, Scanning Capacitance Microscope
Citation
Issues
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Created August 10, 2010, Updated February 19, 2017