U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Comparison of Measurement Techniques for Advanced Photomask Metrology

Published

Author(s)

Stewart Smith, Martin McCallum, Andrew Hourd, J. T. Stevenson, Anthony J. Walton, Ronald G. Dixson, Richard A. Allen, James E. Potzick, Michael W. Cresswell, Ndubuisi George Orji
Proceedings Title
Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures
Conference Dates
March 24-27, 2008
Conference Location
Edinburgh, UK
Conference Title
2008 IEEE Conference on Microelectronics Test Structures
Pub Type
Conferences
Semiconductors and Dimensional metrology

Citation

Smith, S. , McCallum, M. , Hourd, A. , Stevenson, J. , Walton, A. , Dixson, R. , Allen, R. , Potzick, J. , Cresswell, M. and Orji, N. (2008), Comparison of Measurement Techniques for Advanced Photomask Metrology, Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures, Edinburgh, UK (Accessed October 10, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created March 23, 2008, Updated October 12, 2021