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Comparison of Measurement Techniques for Advanced Photomask Metrology

Published

Author(s)

Stewart Smith, Martin McCallum, Andrew Hourd, J. T. Stevenson, Anthony J. Walton, Ronald G. Dixson, Richard A. Allen, James E. Potzick, Michael W. Cresswell, Ndubuisi George Orji
Proceedings Title
Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures
Conference Dates
March 24-27, 2008
Conference Location
Edinburgh, UK
Conference Title
2008 IEEE Conference on Microelectronics Test Structures

Citation

Smith, S. , McCallum, M. , Hourd, A. , Stevenson, J. , Walton, A. , Dixson, R. , Allen, R. , Potzick, J. , Cresswell, M. and Orji, N. (2008), Comparison of Measurement Techniques for Advanced Photomask Metrology, Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures, Edinburgh, UK (Accessed June 14, 2024)

Issues

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Created March 23, 2008, Updated October 12, 2021