@conference{847561,
  author = {Stewart Smith and Martin McCallum and Andrew Hourd and J. Stevenson and Anthony Walton and Ronald Dixson and Richard Allen and James Potzick and Michael Cresswell and Ndubuisi Orji},
  title = {Comparison of Measurement Techniques for Advanced Photomask Metrology},
  year = {2008},
  month = {2008-03-24 00:03:00},
  publisher = {Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures, Edinburgh, UK},
  language = {en},
}