TY  - CONF
AU  - Stewart Smith
AU  - Martin McCallum
AU  - Andrew Hourd
AU  - J. Stevenson
AU  - Anthony Walton
AU  - Ronald Dixson
AU  - Richard Allen
AU  - James Potzick
AU  - Michael Cresswell
AU  - Ndubuisi Orji
C2  - Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures, Edinburgh, UK
DA  - 2008-03-24 00:03:00
LA  - en
PB  - Proceedings of the 2008 IEEE Conference on Microelectronics Test Structures, Edinburgh, UK
PY  - 2008
TI  - Comparison of Measurement Techniques for Advanced Photomask Metrology
ER  -