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Compact Force Sensors for Low-Force Mechanical Probe Calibration

Published

Author(s)

Douglas T. Smith, S Woody, Jon R. Pratt

Abstract

The loading mechanisms of instrumented indentation machines are often calibrated using deadweights. In many cases, due to the geometry of the loading frame, the applied deadweight is tensile, while the indentation leads to be measured are compressive. In this paper, we report preliminary efforts to develop a compressive load cell for use on a typical instrumented indentation machine. Two devices were evaluated, one a compact capacitance-based device (fabricated at the National Instititue of Standards and Technology), the other a piezoresistive force sensor. We will describe the calibration sensitivity, stability and drift of each, and discuss the potential use of each as a force transfer artifact for the calibration of instrumented indenters.
Proceedings Title
Proc. International Measures Conference, Joint International Conference on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the Age of Globalization
Conference Dates
September 24-26, 2002
Conference Location
Celle, GE
Conference Title
International Conference on Characterization and Metrology

Keywords

atomic force microscopy, force metrology, indentation, load cell, nanoindentation

Citation

Smith, D. , Woody, S. and Pratt, J. (2002), Compact Force Sensors for Low-Force Mechanical Probe Calibration, Proc. International Measures Conference, Joint International Conference on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the Age of Globalization, Celle, GE (Accessed June 20, 2024)

Issues

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Created June 1, 2002, Updated February 19, 2017