@conference{93091, author = {Douglas Smith and S Woody and Jon Pratt}, title = {Compact Force Sensors for Low-Force Mechanical Probe Calibration}, year = {2002}, month = {2002-06-01}, publisher = {Proc. International Measures Conference, Joint International Conference on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the Age of Globalization, Celle, GE}, language = {en}, }