This work proposes a procedure to characterize the intrinsic nonlinearities of bulk acoustic wave resonators by performing one port measurements of the second harmonic and second order intermodulation spurious signals. Closed-form expressions have been derived that relate the nonlinear stiffened elasticity with experimental observables. These formulas are valid in a wide margin of frequencies around resonance and have been verified with nonlinear circuit simulations. The measurement set-up and its effects are also treated in our approach. Measurements of a set of Aluminum Nitride based devices from several manufacturers yield consistent model parameters and allow us to obtain a nonlinear stiffened elasticity intrinsic to this piezoelectric material.
Citation: IEEE Transactions on Microwave Theory and Techniques
Pub Type: Journals
Bulk Acoustic Wave, Film Bulk Acoustic Resonator, Nonlinearities, Intermodulation Distortion, Harmonic Generation, Nonlinear KLM, Nonlinear Stiffened Elasticity, Nonlinear Elastic Constant