Stocker, M.
, Silver, R.
, Attota, R.
and Jun, J.
(2007),
Certification of Standard Reference Material® 5000: Calibrated Overlay Wafer Standard:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-165
(Accessed April 25, 2024)
Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
Certification of Standard Reference Material® 5000: Calibrated Overlay Wafer Standard:
Published
Author(s)
, , ,
Citation
- NIST SP 260-165
Report Number
NIST SP 260-165
Pub Type
NIST Pubs
Download Paper
Citation
Created January 1, 2007, Updated May 20, 2023