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Certification of Standard Reference Material® 5000: Calibrated Overlay Wafer Standard:

Published

Author(s)

Michael T. Stocker, Richard M. Silver, Ravikiran Attota, Jay S. Jun
Citation
- NIST SP 260-165
Report Number
NIST SP 260-165

Citation

Stocker, M. , Silver, R. , Attota, R. and Jun, J. (2007), Certification of Standard Reference Material® 5000: Calibrated Overlay Wafer Standard:, , National Institute of Standards and Technology, Gaithersburg, MD, [online], https://doi.org/10.6028/NIST.SP.260-165 (Accessed July 21, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2007, Updated May 20, 2023