@misc{1129966,
  author = {Michael T. Stocker and Richard M. Silver and Ravikiran Attota and Jay S. Jun},
  title = {Certification of Standard Reference Material® 5000: Calibrated Overlay Wafer Standard:},
  year = {2007},
  month = {2007-01-01 05:01:00},
  publisher = {, National Institute of Standards and Technology, Gaithersburg, MD},
  doi = {https://doi.org/10.6028/NIST.SP.260-165},
  language = {en},
}