TY  - GEN
AU  - Michael T. Stocker
AU  - Richard M. Silver
AU  - Ravikiran Attota
AU  - Jay S. Jun
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2007-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.SP.260-165
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2007
TI  - Certification of Standard Reference Material® 5000: Calibrated Overlay Wafer Standard:
ER  -