TY  - GEN
AU  - Stocker, Michael T.
AU  - Silver, Richard M.
AU  - Attota, Ravikiran
AU  - Jun, Jay S.
C2  - , National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2007-01-01 05:01:00
DO  - https://doi.org/10.6028/NIST.SP.260-165
LA  - en
PB  - , National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2007
TI  - Certification of Standard Reference Material® 5000: Calibrated Overlay Wafer Standard:
ER  -