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PUBLICATIONS

Binary Pseudo-Random Arrays for Instrument Transfer Function Calibration of Surface Texture Microscopes

Published

Author(s)

Ulf Griesmann, Keiko Munechika, Thomas Renegar, Xiaoyu Zheng, Weilun Chao, Ian Lacey, Carlos Pina-Hernandez, Johannes Soons, Valeriy Yashchuk

Abstract

N/A
Proceedings Title
Metrology and Properties of Engineering Surfaces. International Conference 2022, Publisher: Institute of Physics (IOP)
Conference Dates
June 27-30, 2022
Conference Location
Glasgow, GB
Conference Title
Met & Props 2022
Pub Type
Conferences

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Keywords

surface texture, surface roughness, microscopy, pseudo-random array
Optical / photometry / laser metrology and Dimensional metrology

Citation

Griesmann, U. , Munechika, K. , Renegar, T. , Zheng, X. , Chao, W. , Lacey, I. , Pina-Hernandez, C. , Soons, J. and Yashchuk, V. (2022), Binary Pseudo-Random Arrays for Instrument Transfer Function Calibration of Surface Texture Microscopes, Metrology and Properties of Engineering Surfaces. International Conference 2022, Publisher: Institute of Physics (IOP), Glasgow, GB, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934831 (Accessed November 12, 2025)

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Created June 27, 2022, Updated September 29, 2025
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