TY - CONF AU - Griesmann, Ulf AU - Munechika, Keiko AU - Renegar, Thomas AU - Zheng, Xiaoyu AU - Chao, Weilun AU - Lacey, Ian AU - Pina-Hernandez, Carlos AU - Soons, Johannes AU - Yashchuk, Valeriy C2 - Metrology and Properties of Engineering Surfaces. International Conference 2022, Publisher: Institute of Physics (IOP), Glasgow, GB DA - 2022-06-27 04:06:00 LA - en PB - Metrology and Properties of Engineering Surfaces. International Conference 2022, Publisher: Institute of Physics (IOP), Glasgow, GB PY - 2022 TI - Binary Pseudo-Random Arrays for Instrument Transfer Function Calibration of Surface Texture Microscopes UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934831 ER -