@conference{1290776,
  author = {Ulf Griesmann and Keiko Munechika and Thomas Renegar and Xiaoyu Zheng and Weilun Chao and Ian Lacey and Carlos Pina-Hernandez and Johannes Soons and Valeriy Yashchuk},
  title = {Binary Pseudo-Random Arrays for Instrument Transfer Function Calibration of Surface Texture Microscopes},
  year = {2022},
  month = {2022-06-27 04:06:00},
  publisher = {Metrology and Properties of Engineering Surfaces. International Conference 2022, Publisher: Institute of Physics (IOP), Glasgow, GB},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=934831},
  language = {en},
}