Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

An Approach to Accurate X-Ray Mask Measurements in a Scanning Electron Microscope

Published

Author(s)

Michael T. Postek, Robert D. Larrabee, William J. Keery
Citation
NIST Interagency/Internal Report (NISTIR) -
Volume
89
Issue
4047

Citation

Postek, M. , Larrabee, R. and Keery, W. (1989), An Approach to Accurate X-Ray Mask Measurements in a Scanning Electron Microscope, NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD (Accessed March 29, 2024)
Created December 31, 1988, Updated October 12, 2021