TY  - GEN
AU  - Michael Postek
AU  - Robert Larrabee
AU  - William Keery
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 1989-01-01 00:01:00
LA  - en
M1  - 89
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 1989
TI  - An Approach to Accurate X-Ray Mask Measurements in a Scanning Electron Microscope
ER  -