@misc{776416,
  author = {Michael Postek and Robert Larrabee and William Keery},
  title = {An Approach to Accurate X-Ray Mask Measurements in a Scanning Electron Microscope},
  year = {1989},
  number = {89},
  month = {1989-01-01 00:01:00},
  publisher = {NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD},
  language = {en},
}