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Application of CMOS-Compatible Micro-Hotplates for In-Situ Process Monitors

Published

Author(s)

John S. Suehle, Michael Gaitan
Proceedings Title
IEEE 1992 International Wafer Level Reliability Workshop
Conference Dates
October 25-28, 1992
Conference Location
Lake Tahoe, CA, USA

Citation

Suehle, J. and Gaitan, M. (1992), Application of CMOS-Compatible Micro-Hotplates for In-Situ Process Monitors, IEEE 1992 International Wafer Level Reliability Workshop, Lake Tahoe, CA, USA (Accessed June 23, 2024)

Issues

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Created December 30, 1992, Updated October 12, 2021