@conference{761881,
  author = {John Suehle and Michael Gaitan},
  title = {Application of CMOS-Compatible Micro-Hotplates for In-Situ Process Monitors},
  year = {1992},
  month = {1992-12-31 00:12:00},
  publisher = {IEEE 1992 International Wafer Level Reliability Workshop, Lake Tahoe, CA, USA},
  language = {en},
}