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Analytical Transmission Scanning Electron Microscopy: Extending the Capabilities of a Conventional SEM Using an Off-the-Shelf Transmission Detector

Published

Author(s)

Jason Holm, Bob R. Keller

Abstract

This work demonstrates how a modular transmission detector can be used to extend the analytical capabilities of a conventional SEM. By implementing a new sample holder and aperture system, we show that high angle and other dark field imaging techniques are compatible with one particular modular transmission detector, thereby enabling atomic number contrast.
Proceedings Title
Microscopy & Microanalysis 2015 Meeting
Volume
21 (Suppl 3)
Conference Dates
August 2-6, 2015
Conference Location
Portland, OR, US

Keywords

transmission, t-SEM, STEM

Citation

Holm, J. and Keller, B. (2015), Analytical Transmission Scanning Electron Microscopy: Extending the Capabilities of a Conventional SEM Using an Off-the-Shelf Transmission Detector, Microscopy & Microanalysis 2015 Meeting, Portland, OR, US, [online], https://doi.org/10.1017/S1431927615010119, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918051 (Accessed December 11, 2023)
Created August 6, 2015, Updated April 19, 2022