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AFM Characterization of Semiconductor Line Edge Roughness, Edited by B. Bhushan, H. Fuchs, and S. Hosaka

Published

Author(s)

Ndubuisi G. Orji, M. Sanchez, Jayaraman Raja, Theodore V. Vorburger
Citation
Applied Scanning Probe Methods I (NanoScience and Technology)
Publisher Info
Springer-Verlag, Berlin Heidelberg, -1

Citation

Orji, N. , Sanchez, M. , Raja, J. and Vorburger, T. (2004), AFM Characterization of Semiconductor Line Edge Roughness, Edited by B. Bhushan, H. Fuchs, and S. Hosaka, Applied Scanning Probe Methods I (NanoScience and Technology), Springer-Verlag, Berlin Heidelberg, -1 (Accessed April 15, 2024)
Created March 5, 2004, Updated February 19, 2017