Orji, N.
, Sanchez, M.
, Raja, J.
and Vorburger, T.
(2004),
AFM Characterization of Semiconductor Line Edge Roughness, Edited by B. Bhushan, H. Fuchs, and S. Hosaka, Applied Scanning Probe Methods I (NanoScience and Technology), Springer-Verlag, Berlin Heidelberg, -1
(Accessed October 12, 2025)
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AFM Characterization of Semiconductor Line Edge Roughness, Edited by B. Bhushan, H. Fuchs, and S. Hosaka
Published
Author(s)
, M. Sanchez, Jayaraman Raja,
Citation
Applied Scanning Probe Methods I (NanoScience and Technology)
Publisher Info
Springer-Verlag, Berlin Heidelberg, -1
Pub Type
Book Chapters
Citation
Issues
If you have any questions about this publication or are having problems accessing it, please contact [email protected].
Created March 5, 2004, Updated February 19, 2017