TY  - CHAP
AU  - Ndubuisi Orji
AU  - M. Sanchez
AU  - Jayaraman Raja
AU  - Theodore Vorburger
C2  - Applied Scanning Probe Methods I (NanoScience and Technology), Springer-Verlag, Berlin Heidelberg, -1
DA  - 2004-03-05
LA  - en
PB  - Applied Scanning Probe Methods I (NanoScience and Technology), Springer-Verlag, Berlin Heidelberg, -1
PY  - 2004
TI  - AFM Characterization of Semiconductor Line Edge Roughness, Edited by B. Bhushan, H. Fuchs, and S. Hosaka
ER  -