@inbook{103946,
  author = {Ndubuisi Orji and M. Sanchez and Jayaraman Raja and Theodore Vorburger},
  title = {AFM Characterization of Semiconductor Line Edge Roughness, Edited by B. Bhushan, H. Fuchs, and S. Hosaka},
  year = {2004},
  month = {2004-03-05},
  publisher = {Applied Scanning Probe Methods I (NanoScience and Technology), Springer-Verlag, Berlin Heidelberg, -1},
  language = {en},
}