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Journals

Metal Capillaries for Neutron Lenses

Author(s)
P. L. Reeder, A. J. Peurrung, D. S. Sunberg, J. J. Stoffels, Huaiyu H. Chen-Mayer, David F. Mildner, V. A. Sharov, V. S. Fokin

Application of Transmission Electron Detection to SCALPEL Mask Metrology

Author(s)
R Farrow, Michael T. Postek, William J. Keery, Samuel N. Jones, J R. Lowney, M Blakey, L Fetter, J Griffith, J E. Liddle, L C. Hopkins, H A. Huggins, M Peabody, A Novembre
Linewidth measurements were performed on a 4X scattering with angular limitation in projection electron lithography (SCALPEL) e-beam lithography mask using the...

Uncertainty and Dimensional Calibrations

Author(s)
Theodore D. Doiron, John R. Stoup
The calculation of uncertainty for a measurement is an effort to set reasonable bounds for the measurement result according to standardized rules. Since every...
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