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Laser ionization mass spectrometry measurements of arsenic sticking and incorporation during GaAs(100) homoepitaxy
Published
Author(s)
A K. Ott, S M. Casey, S R. Leone
Citation
Journal of Crystal Growth
Volume
181
Pub Type
Journals
Citation
Ott, A.
, Casey, S.
and Leone, S.
(1997),
Laser ionization mass spectrometry measurements of arsenic sticking and incorporation during GaAs(100) homoepitaxy, Journal of Crystal Growth
(Accessed April 28, 2024)