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Laser ionization mass spectrometry measurements of arsenic sticking and incorporation during GaAs(100) homoepitaxy

Published

Author(s)

A K. Ott, S M. Casey, S R. Leone
Citation
Journal of Crystal Growth
Volume
181

Citation

Ott, A. , Casey, S. and Leone, S. (1997), Laser ionization mass spectrometry measurements of arsenic sticking and incorporation during GaAs(100) homoepitaxy, Journal of Crystal Growth (Accessed February 21, 2024)
Created December 31, 1996, Updated October 12, 2021