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Laser ionization mass spectrometry measurements of arsenic sticking and incorporation during GaAs(100) homoepitaxy

Published

Author(s)

A K. Ott, S M. Casey, S R. Leone
Citation
Journal of Crystal Growth
Volume
181

Citation

Ott, A. , Casey, S. and Leone, S. (1997), Laser ionization mass spectrometry measurements of arsenic sticking and incorporation during GaAs(100) homoepitaxy, Journal of Crystal Growth (Accessed July 22, 2024)

Issues

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Created December 31, 1996, Updated October 12, 2021