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In this paper we will focus on the different metrology techniques used to measure features on photomasks. In view of the above discussion, we will focus on the
In semiconductor electronics applications, line edge and linewidth roughness are generally measured using a root mean square (RMS) metric. The true value of RMS
I summarize what is currently known about how thermal effects limit the storage capacity of magnetic disk drives. The physics of thermal fluctuations in
Laurie E. Locascio, Wyatt N. Vreeland, Andreas Jahn, Michael Gaitan
The discovery that phospholipids spontaneously form fluid-filled bubbles when exposed to aqueous solution was first made by Alec Bangham in the early 1960's
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Two tracks within TREC have examined the problem of retrieving noisy documents---documents whose content is not necessarily a faithful representation of the
These days it's hard to imagine life without the benefits of integration, computers, and the internet. Even simple tasks such as shopping for food have gone
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Ronald L. Jones, Vivek M. Prabhu, D M. Goldfarb, Eric K. Lin, Christopher L. Soles, Joseph~undefined~undefined~undefined~undefined~undefined Lenhart, Wen-Li Wu, M Angelopoulos
A model bilayer geometry is used to examine fundamental contributions of in-situ reaction front profile width on resulting line edge roughness after development
This chapter reviews the best current information about the thermophysical properties of the fluid phases of water, focusing particularlyon the way in which
Critical Dimension (CD) control begins at the photomask. Therefore, photomask metrology is a principal enabler for the development and manufacture of current
Eswaran Subrahmanian, Ram D. Sriram, Paulien Herder, Henri Christiaans, Ralph Schneider
Study of design and norms for designing dates back 2000 years when Vitruvious first wrote his book on architectural design and prescribed what a designer ought
David F. Plusquellic, T M. Korter, Gerald T. Fraser, R J. Lavrich, Eric C. Benck, C R. Bucher, Angela R. Hight Walker, J L. Domenech
Continuous-wave linear-absorption spectroscopy based on THz radiation generated by solid-state photomixers has been applied to the investigation of the dynamics
We consider the radiation force on highly dispersive media. In doing so we reconsider an experiment proposed to measure the Abraham force term in the stress