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Wen-Li Wu

Dr. Wu's primary field of scientific expertise is the development of advanced x‑ray/neutron scattering methods and their applications to investigations of the structure and properties of polymeric materials in thin films and at interfaces.

Awards and Honors

  • Department of Commerce Bronze Medal (1984)
  • Department of Commerce Silver Medal (1989)
  • Department of Commerce Gold Medal (1992)
  • Fellow of the American Physical Society (1992)
  • Samuel Wesley Stratton Award (1997)
  • William P. Slichter Award (2001 & 2007)
  • Adjunct Professor, Composite Research Center, University of Delaware (1992 - present)
  • Advisory Board Member, Center on Polymer Interfaces and Macromolecular Assemblies, Stanford University (1997 - present)
  • NIST Fellow (2004-present)
  • PMSE Fellow, American Chemical Society (2006)
  • Fellow, Neutron Scattering Society of America (2010)
  • ACS National Award for Team Innovation (2019)

Publications

X-ray Metrology for the Semiconductor Industry Tutorial

Author(s)
Daniel F. Sunday, Wen-Li Wu, Scott Barton, Regis J. Kline
The semiconductor industry is in need of new, in-line dimensional metrology methods with higher spatial resolution for characterizing their next generation
Created October 9, 2019