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NIST Researchers Receive 2019 ACS National Award
For developing the metrology ecosystem that was critical to improving chemically amplified photoresist formulations, enabling sub-100 nm lithographic patterning strategies, and realizing high performance semiconductors. The award will be presented on April 2, 2019 at the 257th ACS National Meeting in Orlando.
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(301) 975-8087
Created September 19, 2018, Updated November 15, 2019