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Ulf Griesmann (Fed)

Ulf Griesmann is a physicist in the Surface and Interface Metrology Group in the Sensor Science Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST).

Publications

Manufacture of Extremely Flat 300 mm Silicon Wafers

Author(s)
Marc Tricard, Paul Dumas, Christopher Hall, Ulf Griesmann, Quandou (. Wang
The flatness requirement for silicon wafers at the exposure site will be lower than 50 nm by 2010 and may be as low as 25nm by 2015 (TRS 2005). This creates new
Created April 23, 2019, Updated June 15, 2021