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Ulf Griesmann

Ulf Griesmann is a physicist in the Surface and Interface Metrology Group in the Sensor Science Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST).

Publications

Process improvements in the production of silicon immersion gratings

Author(s)
Cynthia Brooks, Benjamin Kidder, Michelle Grigas, Daniel Jaffe, Ulf Griesmann, Daniel Wilson, Richard Muller
We have explored a number of lithographic techniques and improvements to produce the resist lines that then define the grating groove edges of silicon immersion
Created April 23, 2019