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John S. Villarrubia

Dr. Villarrubia is a physicist in the Nanoscale and Nanostructure Metrology Group in the Microsystems and Nanotechnology Division of the Physical Measurement Laboratory (PML) at the National Institute of Standards and Technology (NIST).

Publications

Research Update: Electron beam-based metrology after CMOS

Author(s)
James A. Liddle, Brian D. Hoskins, Andras Vladar, John S. Villarrubia
The strengths of and challenges facing electron-based metrology for post-CMOS technology are reviewed. Directed self-assembly, nanophotonics/plasmonics, and

3D Nanometrology Based on SEM Stereophotogrammetry

Author(s)
Vipin N. Tondare, John S. Villarrubia, Andras Vladar
Three-dimensional (3D) reconstruction of a sample surface from scanning electron microscope (SEM) images taken at two perspectives has been known for decades.
Created October 9, 2019